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Semiconductor crystal micro-defect inspection system
Si GaAs CdTe ZnSe oxide crystal, etc. Dislocations, stacking faults, precipitates, residual strain, uneven doping, etc. High-sensitivity detection of minute defects by light scattering tomography method and PL method 
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 Dislocations in In doped GaAs |
 Entangled dislocation loops observed by LST |
 Entangled dislocation loops observed by PLT |